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        <description>Journal for the Edwards AUTO 306 Coating Systems

This is the journal.  See the Edwards AUTO 306 Coating System project page for an overview.

Day 2026-04-25 (q3k, rahix, zdmx, leah, rob, guest)

Played with some coating tests, see Lab Notes for FAFO Semiconductor Processes (2026-04-25).

Day 2026-04-19 (q3k, Hugo, Guest)

Vent valve was not stuck - a sintered KF filter ring in front of it was. Removed filter ring, replaced with normal ring. Chamber now vents aggressively, added a flow restricto…</description>
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        <title>log - [Journal for E306A Coating System] </title>
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        <description>Journal for E306A Coating System

See main page for details about the system itself.

Day 2026-04-25 (rahix)

Electrical inspection (V3) of the machine. Rewired a few plugs. Everything passed!

Day 2026-04-12 (q3k)

Fit new vent valve holder. Still a bit loose but better. Should probably hold the pipeline instead of the valve</description>
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        <title>start</title>
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        <description>Edwards AUTO 306 Coating System



Multi-process PVD system consisting of two Edwards AUTO 306 coaters and a control cabinet.

Capabilities: Right unit: Thermal evaporation, e-beam. Left unit: sputter.

Status

Sputter:

Needs Argon and refurbishing / bringup.</description>
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        <title>start - [Status] </title>
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        <description>Edwards E306A



Thermal evaporation coater.

Nicknamed: King Edward. For he is crowned. (TODO: picture when crowned)

Construction year: 198x (TODO)

Capabilities: Thermal evaporation only. 4 boat/source turret.

Vacuum system: backing pump + diffusion pump</description>
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        <description>FAFO Semiconductor Processes

At this stage, we are exploring our options for the various processes needed in semiconductor manufacturing. We have amassed quite a bit of equipment by now, but need to figure out what works for us and how to reliably reproduce results.</description>
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        <description>Lab Notes for FAFO Semiconductor Processes

Notes from experimenting with our equipment to slowly build up process knowledge for the various semiconductor steps.

Check the FAFO Semiconductor Processes project page for an overview.

Day 2026-04-25 (q3k, rahix, zdmx, leah, rob, guest)</description>
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	*  Home Page

Organization @account-group.svg

	*  Frequenty Asked Questions
	*  Events
	*  Donate
	*  Impressum
	*  Contact

Equipment @tools.svg

	*  Zeiss DSM 962 SEM
	*  Edwards AUTO 306 Coating System
	*  Edwards E306A Evaporation Coater
	*  Karl Süss MJB3 Mask Aligner
	*  Miscellaneous Equipment
	*  JEOL JSM-T330A SEM Sent to live in a Hackerspace upstate...

Projects @clipboard.svg

	*  Roadmap – FAFO Tech Tree
	*  Semiconductor Processes
	*  Scanning …</description>
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        <description>Picture Gallery

Various pictures taken at FAFO :)

Evaporation Coated 3D-Print (2026-04-25)



We used out Edwards AUTO 306 Coating System to thermally evaporate aluminum onto a 3D-printed PETG part. It doesn&#039;t stick well, but it was a fun exercise to see what happens when a 3D-print is placed into a vacuum chamber.</description>
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