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equipment:edwards-306:log [2026/05/07 20:54] – q3kequipment:edwards-306:log [2026/05/16 22:22] (current) – [Day 2026-05-6 (q3k, implr, hugo)] q3k
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 This is the journal.  See the [[equipment:edwards-306:start|Edwards AUTO 306 Coating System]] project page for an overview. This is the journal.  See the [[equipment:edwards-306:start|Edwards AUTO 306 Coating System]] project page for an overview.
  
 +==== Day 2026-05-16 (q3k, implr, hugo) ====
 +
 +Further work on the e-beam. Successfully evaporated Al (~140nm, multiple runs) on Cr (~1nm) on glass. Good adhesion.
 +
 +Al is very slow to evaporate for some reason.
 +
 +Successfully evaporated Al on Si.
 +
 +Successfully evaporated SiO2 on Al on Si.
 +
 +The cooling capacity from the chiller is a bit on the low side, especially when evaporating Al. It seems beneficial to go 'fast and hard' and let the system accumulate heat just for a short period of time rather than slowly depositing very little material but causing the temperature of the cooling water to increase past 35 degrees.
 +
 +==== Day 2026-05-15 (q3k, implr, leah, rahix) ====
 +
 +Rewired the thermal evaporator for 3 phase supply and installed infrastructure for it.  It runs from a 16A circuit now, and has a separate 4mm² potential bonding connection.
 +
 +A separate socket on the same 16A circuit will follow for the sputter coater. This means you shouldn't run them both at the same time.
 +
 +E beam supply has been tested and working. We had to manually enable the water flow sensor interlock input on the control cabinet (purple jumper wire).
 +
 +Getting the e-beam to run was annoying - turns out the system needs to be in 'process' mode.
 +
 +==== Day 2026-05-14 (implr, q3k, Hugo) ====
 +
 +First attempt at starting the sputter system. Hotwired just the Edwards supply skipping Wedel's interlock and pumped down. 3.4E-5 mbar ultimate pressure.
 +Examined the plasma high voltage box - in current configuration it looks like it's just a rectifier + series resistance.
 +
 +{{:equipment:edwards-306:e306_plasma_hv_box.jpg?600|}}
 +
 +Added a manual vent valve to one of the flanges on the back. Replaced the blocked up sintered KF ring on the vent path with a plain ring.
 +Plasma works, with some arcing around the electrodes - possibly breakdown of the built up film?
 ==== Day 2026-05-07 (q3k, Rob) ==== ==== Day 2026-05-07 (q3k, Rob) ====