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equipment:edwards-306:log [2026/05/17 12:30] – [Day 2026-05-16 (q3k, implr, hugo)] rahixequipment:edwards-306:log [2026/06/27 20:27] (current) – [Day 2026-06-27 (rahix)] rahix
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 ===== Journal for the Edwards AUTO 306 Coating Systems ===== ===== Journal for the Edwards AUTO 306 Coating Systems =====
 This is the journal.  See the [[equipment:edwards-306:start|Edwards AUTO 306 Coating System]] project page for an overview. This is the journal.  See the [[equipment:edwards-306:start|Edwards AUTO 306 Coating System]] project page for an overview.
 +
 +==== Day 2026-06-27 (rahix) ====
 +Both coaters now have their own ~3ph outlet (on the same 16A circuit). Installed secondary 4mm² PE connection for the sputter coater.
 +Checked R<sub>LOW</sub> and R<sub>ISO</sub> for both coaters.
 +
 +==== Day 2026-06-12 (q3k, hugo, rahix) ====
 +On the sputter coater, installed 3 new cooling circuit flow sensors to detect problems with the water cooling loops.
 +
 +{{:equipment:edwards-306:20260612-interlock-flow-sensors.jpg?400|}}
 +
 +New interlock cable from those sensors to the control rack made from repurposed CAT6:
 +
 +  * **Orange:** Turbo Interlock (Main)
 +  * **Green:** DC Interlock
 +  * **Brown:** RF Interlock
 +
 +Tested system, no water leaks and interlocks work.
 +
 +The argon supply is still leaking close to the gas bottle.  Will need to fix that soon.
 +
 +Placed the two cheap environment sensors into the controls enclosures of the two coating systems. We did not rename them yet, so the mapping is "Unusually Large Staircase" -> Sputter Coater and "Chillzone" -> Evap Coater.
 +==== Day 2026-06-07 (q3k, guests) ====
 +//To be documented//
 +
 +==== Day 2026-06-05 (q3k, guests) ====
 +Hair sputtered with Cr, looks like way too much, 3mins at 400W:
 +
 +{{:equipment:edwards-306:20260605-hair1.png?400|}}
 +
 +Hair sputtered with Cr, 3min at 100W:
 +
 +{{:equipment:edwards-306:20260605-hair3.tif.png?400|}}
 +{{:equipment:edwards-306:20260605-hair4.tif.png?400|}}
 +==== Day 2026-05-2x,31 (q3k, hugo, ln, zoé, guests) ====
 +
 +Two days of work on the sputter coater.
 +
 +Ar cylinder connected via needle nose valve (inlet rerouted from MFC input line into dedicated input due to lack of plumbing fittings).
 +
 +RF matchbox ok, but high reflected power (4W at 100W out, 25+W at 200W out).
 +
 +Roughing pump seems very hot, but that might be atmospheric pressure.
 +
 +Turbo start sometimes fails and needs to be reset on the turbo controller. Roughing times out, needs set point changed.
 +
 +Some attempts at sputtering Al with Ar work, some don't. Very inconsistent. Most attempts done at plasma strike pressure, ~2.2*10^-2 mbar.
 +
 +Turns out RF sputter head isn't being cooled well - that might be the cause. We should dismantle it and check for damage (esp. magnets), and also try to cool it with the water chiller attached directly.
 +
 +{{:equipment:edwards-306:202605-sputter-plasma.jpg?400|}}
  
 ==== Day 2026-05-16 (q3k, implr, hugo) ==== ==== Day 2026-05-16 (q3k, implr, hugo) ====
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 A separate socket on the same 16A circuit will follow for the sputter coater. This means you shouldn't run them both at the same time. A separate socket on the same 16A circuit will follow for the sputter coater. This means you shouldn't run them both at the same time.
  
-Measured current of the evaporator without e-beam connected:+Measured current consumption of the evaporator without e-beam connected:
  
 ^System State  ^  Current^ ^System State  ^  Current^
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 |vacuum  |  3.3 A| |vacuum  |  3.3 A|
 |plasma  |  4.4 A| |plasma  |  4.4 A|
-|evaporation setting 8  |  6.5 A|+|**evaporation setting 8**  |  **6.5 A**|
 |vent  |  3.3 A| |vent  |  3.3 A|
 |vacuum after vent, roughing  |  4.0 A| |vacuum after vent, roughing  |  4.0 A|