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Journal for the Edwards AUTO 306 Coating Systems

Day 2026-03-30

Brought the two coating systems and the control cabinet into our lab.

Day 2026-04-18 (q3k, Hugo, Rob, Jana, ln, Guest x3)

Evaporator:

Powered main cooling valve from external 230V. Checked main cooling loop for leaks. Seems ok. Marked valves for the two loops.

Chiller unit couldn't deal with restricted flow form main cooling loop (in series: turbo pump, baffle, quartz microbalance). Put microbalance in parallel with turbo pump and baffle using press-fit T couplings.

Rewired control box (in rack) to work off a single phase. Three phase is only needed for E-Beam power supply. Moved phase for 24V supply onto phase 1 too.

Interlock form control box didn't seem to enable turbo controller (lines 13/14 on I/O connector). Bypassed for now, cable marked.

Main valve didn't seem to be actuated from the control box. Manually enabled for now.

System went down to vacuum but not without a fight (timeouts, etc. - needs a good pumpdown for a few hours). Cleaned main seal. Managed to strike a plasma via HT. Managed to blow out thermal evap boat via LT.

Turbo is very loud. Probably worth checking if we can recondition it.

Shutter operates but slowly. Probably needs regreasing of its o-rings. We might have a replacement rotary feedthrough.

Target rotation works as operated from the panel.

Source change works as operated with the right knob.

Needle valve operates. Butterfly valve in front of needle valve seems to leek - needle valve must be closed on each use.