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--- equipment:edwards-306:start [2026/07/04 21:50] – [Status] rahix
+++ equipment:edwards-306:start [2026/07/18 22:09] (current) – q3k
@@ Line 10: / Line 10: @@
 **Sputter:**
-First sputter experiments were successful, still needs tuning.
+First sputter experiments were successful, process being tuned and MFC contro system is being built
 **Coater:**
-Thermal evaporation works, e-beam needs bringup. Film thickness monitor needs a new crystal.
+Working.
 ===== Resources =====
@@ Line 126: / Line 126: @@
   - Turn off power at rack unit.
+===== Sputter coater MFCs =====
+Channel 1: 100SCCM Ar. Channel 2: 100SCCM N2.
+Pinout:
+  * Pin 2: Control 0-10V (0-100% of rated flow).
+  * Pin 4: Output 0-10V (feedback from control).
+  * Pin 5: shield
+  * Pin 6: +15V
+  * Pin 7: test output (unknown)
+  * Pin 8: common/GND
+  * Pin 9: -15V
+Currently controlled by lab PSUs. Modbus integration is WIP.