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| equipment:edwards-306:start [2026/04/30 18:07] – q3k | equipment:edwards-306:start [2026/04/30 18:46] (current) – q3k | ||
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| ====== Edwards AUTO 306 Coating System ====== | ====== Edwards AUTO 306 Coating System ====== | ||
| - | {{: | + | {{: |
| Multi-process PVD system consisting of two Edwards AUTO 306 coaters and a control cabinet. | Multi-process PVD system consisting of two Edwards AUTO 306 coaters and a control cabinet. | ||
| Line 14: | Line 14: | ||
| **Coater:** | **Coater:** | ||
| - | Thermal evaporation works, e-beam needs bringup. | + | Thermal evaporation works, e-beam needs bringup. Film thickness monitor needs a new crystal. |
| ===== Resources ===== | ===== Resources ===== | ||
| * [[equipment: | * [[equipment: | ||
| + | * [[https:// | ||
| + | * [[https:// | ||
| + | * [[https:// | ||
| * Techtree: [[https:// | * Techtree: [[https:// | ||
| + | {{: | ||
| - | ===== Operation Procedures | + | ===== Standard Operating Procedure |
| Currently written for the thermal evap unit, should be unified with the sputter unit as it is brought up. | Currently written for the thermal evap unit, should be unified with the sputter unit as it is brought up. | ||
| Line 33: | Line 37: | ||
| - Power failure recovery (if cold) | - Power failure recovery (if cold) | ||
| - | - Backing: connects the roughing pump to the turbo, get it down to operating pressure | + | - **Backing**: connects the roughing pump to the turbo, get it down to operating pressure |
| - | - Turbo start: starts up the turbo, wait for it to spin up. | + | - **Turbo start**: starts up the turbo, wait for it to spin up. |
| Then, continuing (or picking up from the chamber having been vented by the user at a later stage): | Then, continuing (or picking up from the chamber having been vented by the user at a later stage): | ||
| - | - Roughing: connects the roughing pump to the chamber, bypassing the turbo, gets it down to a rough pressure to connect the turbo | + | - **Roughing**: connects the roughing pump to the chamber, bypassing the turbo, gets it down to a rough pressure to connect the turbo |
| - | - Pumping down: connects the roughing pump to the chamber, opens the high pressure valve between the turbo and the chamber | + | - **Pumping down**: connects the roughing pump to the chamber, opens the high pressure valve between the turbo and the chamber |
| - | - Fine pumping: continuing above, but now without any timeout - it's just trying to do its best. | + | - **Fine pumping**: continuing above, but now without any timeout - it's just trying to do its best. |
| The user can request the following actions at various stages: | The user can request the following actions at various stages: | ||
| - | | + | |
| - | | + | |
| - | | + | |
| - | | + | |
| - | | + | |
| - | | + | |
| In practice, we use the system by first getting it to a high vacuum (cycle), possibly sealing/ | In practice, we use the system by first getting it to a high vacuum (cycle), possibly sealing/ | ||
| + | |||
| + | ==== Caution ==== | ||
| + | |||
| + | - Wear nitrile gloves when operating inside the chamber. | ||
| + | - Be careful when reaching for parts of the chamber after thermal evaporation - they will be hot! | ||
| ==== Startup Process ==== | ==== Startup Process ==== | ||
| Line 71: | Line 80: | ||
| - Press ' | - Press ' | ||
| - Once the vacuum control panel shows 'TURBO START', | - Once the vacuum control panel shows 'TURBO START', | ||
| - | | + | - Press ' |
| - | | + | - Insert sample, and check that shutter actuates when ' |
| - | - Press ' | + | |
| - | - If you already have a sample, wait until you reach the 'FINE PUMPING' | + | |
| + | ==== Plasma Cleaning ==== | ||
| + | |||
| + | - Load sample | ||
| + | - Press ' | ||
| + | - Wait until 'fine pumping' | ||
| + | - Press ' | ||
| + | - Select | ||
| + | - Open the vent butterfly valve (below chamber), and then slowly open needle valve until pressure starts rising. | ||
| + | - Close valves when pressure reaches around 1e-1 mbar. If overshot, restart process. | ||
| + | - Set LT/0/HT selector to HT, slowly bring up power knob until plasma starts in the chamber and current flows. | ||
| + | - Tweak needle valve and power until a stable plasma is achieved that fills up as much of the chamber as possible. | ||
| + | - Manual recommends running plasma cleaning for 20 minutes for every loaded sample before coating it. No experiments have been performed | ||
| ==== Simple Coating ==== | ==== Simple Coating ==== | ||
| Line 86: | Line 107: | ||
| - Slowly increase the knob until the Al melts. | - Slowly increase the knob until the Al melts. | ||
| - Decrease the knob back until red hot (around 5?). | - Decrease the knob back until red hot (around 5?). | ||
| + | - Press SS1 to open the shutter (not that it does much for evap). | ||
| - Start a timer, eg. 30 seconds. | - Start a timer, eg. 30 seconds. | ||
| + | - Press SS1 to close the shutter. | ||
| - Set knob to 0, set HT/0/LT selector to 0. | - Set knob to 0, set HT/0/LT selector to 0. | ||
| - Vent the system. | - Vent the system. | ||
| - | ==== Shutdown | + | ==== Shutdown |
| - Press ' | - Press ' | ||