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equipment:jeol-t330a [2024/10/03 19:19] – [Base Device] rahixequipment:jeol-t330a [2025/05/10 22:53] (current) – q3k
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 {{:equipment:jeol-t330a:2024-07-30-23-47-09-113.jpg?800|}} {{:equipment:jeol-t330a:2024-07-30-23-47-09-113.jpg?800|}}
  
-Our scanning electron microscope. Quick specs:+Our first scanning electron microscope. Nicknamed 'Kenji'. Quick specs:
  
 **Maximum acceleration voltage:** 30kV **Maximum acceleration voltage:** 30kV
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 | Flange towards Column  | 1      | 26 x 3.5  |                      | | Flange towards Column  | 1      | 26 x 3.5  |                      |
 | Flange towards RP      | 1      | 21 x 2.2  | Odd size?            | | Flange towards RP      | 1      | 21 x 2.2  | Odd size?            |
- +| Flange towards solenoid valve      | 1      | 26 x 3.5  |             |
-=== Connector types === +
- +
-Connector types observed in the machine: +
- +
-  - 7556 series: {{ :equipment:jeol-t330a:7.50-5.00mm-vertical-header-7556-series-header.pdf |}} +
-  - DF1 series: {{ :equipment:jeol-t330a:df1-12s-2.5r26_05_cl0541-0068-0-05_catalog_d49650_en.pdf |}}+
  
 ==== Attachments ==== ==== Attachments ====
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-===== To do =====+==== Electronics ====
  
-==== Blockers ====+=== 'PC' DE9 connector ===
  
-  - Machine/acquire sample holders +Seemingly allows for beam control. Asserting pin 3 disables display and enables external control. Pins 1 and 7 then allow for X/Y scanning (+/- 5V?). Pin 4 should provide detector data.
-  - Track down column leak(s) +
-  - Fix gun bias linkage to VR1 in transformer oil tank (the stoppers are loose) +
-  - Check/replace scintillator+
  
-==== Medium-term ====+^ Pin on DE9 ^ Location in scope       ^ Description                          ^ 
 +| 1          | PK00492 EK8 pin 4       | External vertical deflection         | 
 +| 2          |                         | GND for pin 7                        | 
 +| 3          | PK00591 EF1 pins 2, 4   | Combined blank/external video signal | 
 +| 4          | PK00492 EK3 pins 5, 7   | Video signal (post ACB)              | 
 +| 5          |                         | GND for pin 4                        | 
 +| 6          |                         | GND for pin 1                        | 
 +| 7          | PK00492 EK8 pin 2       | External horizontal deflection       | 
 +| 8          |                         | GND for pin 3                        | 
 +| 9          | N/C                     | N/C                                  |
  
-  - Rewire DP to only run when V1 is open? + 
-  - Machine mount for replacement Pirani gauge and reinstall cold cathode gauge+=== Connector types === 
 + 
 +Connector types observed in the machine: 
 + 
 +  - 7556 series: {{ :equipment:jeol-t330a:7.50-5.00mm-vertical-header-7556-series-header.pdf |}} 
 +  - DF1 series: {{ :equipment:jeol-t330a:df1-12s-2.5r26_05_cl0541-0068-0-05_catalog_d49650_en.pdf |}} 
 + 
 +==== Open Beam Interface (digital acquisition) ==== 
 + 
 +Use [[https://git.fa-fo.de/fafo/jeol-t330a/src/branch/main/obi/microscope.toml|microscope.toml]] from [[https://git.fa-fo.de/fafo/jeol-t330a]|our repo]]. There's also a obi.nix next to it to build the OBI codebase on Nix. 
 + 
 +Connect the OBI to power (currently through bundle of DIN SMPSes next to OBI), connect the OBI to the WHLE-LSE-1088A box via USB (or connect directly to your PC and run your own obi-server, after editing microscope.toml). Run GUI against microscope.toml. 
 + 
 +TODO: move to dedicated mini PC (q3k ordered one). 
 + 
 +===== To do =====
  
 ==== Long-term ==== ==== Long-term ====
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   - Replace diffusion pump with turbomolecular pump   - Replace diffusion pump with turbomolecular pump
   - Get a better roughing pump (scroll) so it doesn't spew oil everywhere   - Get a better roughing pump (scroll) so it doesn't spew oil everywhere
-  - Figure out what the 'PC' wire harness does 
-  - Digital control and acquisition 
   - E-beam lithography   - E-beam lithography
  
 +===== Log =====
  
-===== To buy =====+=== 2025/05/11 (q3k, rob, rahix) ===
  
-  - 2x M4x7.5mm screws for clamping down transformer wires in control module +Attached and tested Open Beam Interface.
-  - [[https://www.microtonano.com/Super-smooth-conductive-double-sided-adhesive-carbon-tapes-for-SEM-EDS-and-GSR.php|Double-sided carbon adhesive tape]] ~24€ +
-  - (Torx?) socket cap head M4x12 screws for vacuum fittings+
  
-===== Log =====+=== 2025/01/31 (q3k, rob, 0ff) === 
 + 
 +New sample holder (EM-Tec JV50 + EM-Tec J4) has been attached. 
 + 
 +=== 2025/01/10 (q3k, rob, 0ff) === 
 + 
 +New scintillator (PLANOTEC P47) has been mounted. 
 + 
 +=== 2024/11/09 (hugo, rahix, leah, ln) === 
 + 
 +Replaced the succbone relay boards with a MODBUS-based system.  Added MODBUS-based temperature measurements for the diffusion pump. 
 + 
 +=== 2024/10/15 (q3k, rob) === 
 + 
 +Buzzed out 'PC' connector and added scan output connector. 
 + 
 +=== 2024/10/14 (q3k, 0ff, hugo) === 
 + 
 +Cleaned apertures in column a bit after building custom tool to extract the pole parts from the column. 
 + 
 +Got some even better images. 
 + 
 +=== 2024/10/12 (q3k, hugo, 2x guest) === 
 + 
 +Fixed alignment of the cathode. Spent some time dialing in optics. 
 + 
 +Got some better images. 
 + 
 +=== 2024/10/10 (q3k, hugo, 0ff, rob) === 
 + 
 +Attached samples to stage (QF105 die, stainless steel M3 screw). 
 + 
 +Took first images, but they're very grainy. 
 + 
 +Weird electron gun behaviour. Filament doesn't seem to saturate. Increasing current would increase emissions, but past some point the emissions would just stop. No second bump even with the filament knob all up to 11. Gun bias anything other than lowest setting would pretty much stop all emissions. 
 + 
 +q3k says: 
 + 
 +  - Maybe I reassembled the wehnelt wrong? 
 +  - Maybe I damaged the cathode when cleaning the wehnelt? 
 +  - Maybe I reconnected the HV cable to the electron gun wrong? I pulled it out when I thought I had to empty the transformer tank. 
 + 
 +To set the electron gun bias according per the manual's process, filament current readout is needed. The one built into the scope broke because the comparator in the checker board got fried again. We should figure out what's happening there. We might also be able to just remove the comparator. 
 + 
 +=== 2024/10/05 (q3k, rahix, rob) === 
 + 
 +Tested diffusion pump with new oil.  After outgassing, got down to the 6e-3 mbar that we also got with the other oil.  Tested the ionization gauge which started showing lower values.  Unsure whether we can still trust the pirani gauge values in this pressure range, but also uncertain about the state of the ionization gauge. 
 + 
 +Turned on the electron beam for the first time. 
 + 
 +=== 2024/10/04 (q3k, rahix, hugo, guest) === 
 + 
 +Replaced the diffusion pump oil with a proper one.  Unfortunately didn't get to test it yet. 
 + 
 +Replaced the DP heater wiring.  Did some work on the succbone control system. 
 + 
 +=== 2024/10/03 (q3k, rahix, guests) === 
 + 
 +Investigated the roughing pump in more detail.  Connecting our pirani gauge to the pump directly, we can reach 1.5e-2 mbar.  Not great, but significantly better than the results with the full system connected.  So we're out to hunt for a few more leaks at least. 
 + 
 +Serviced the "RP vent valve" as this hasn't been done before.  No improvements, though.
  
 === 2024/09/28 (q3k, rob, rahix) === === 2024/09/28 (q3k, rob, rahix) ===