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equipment:jeol-t330a [2024/10/11 10:54] – [Medium-term] q3kequipment:jeol-t330a [2025/02/07 11:28] (current) – q3k
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 {{:equipment:jeol-t330a:2024-07-30-23-47-09-113.jpg?800|}} {{:equipment:jeol-t330a:2024-07-30-23-47-09-113.jpg?800|}}
  
-Our scanning electron microscope. Quick specs:+Our first scanning electron microscope. Nicknamed 'Kenji'. Quick specs:
  
 **Maximum acceleration voltage:** 30kV **Maximum acceleration voltage:** 30kV
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 | Flange towards RP      | 1      | 21 x 2.2  | Odd size?            | | Flange towards RP      | 1      | 21 x 2.2  | Odd size?            |
 | Flange towards solenoid valve      | 1      | 26 x 3.5  |             | | Flange towards solenoid valve      | 1      | 26 x 3.5  |             |
- 
-=== Connector types === 
- 
-Connector types observed in the machine: 
- 
-  - 7556 series: {{ :equipment:jeol-t330a:7.50-5.00mm-vertical-header-7556-series-header.pdf |}} 
-  - DF1 series: {{ :equipment:jeol-t330a:df1-12s-2.5r26_05_cl0541-0068-0-05_catalog_d49650_en.pdf |}} 
  
 ==== Attachments ==== ==== Attachments ====
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-===== To do =====+==== Electronics ====
  
-==== Blockers ====+=== 'PC' DE9 connector ===
  
-  - Machine/acquire sample holders +Seemingly allows for beam control. Asserting pin 3 disables display and enables external control. Pins 1 and 7 then allow for X/Y scanning (+/- 5V?). Pin 4 should provide detector data.
-  - Track down column leak(s) +
-  - Check/replace scintillator+
  
 +^ Pin on DE9 ^ Location in scope       ^ Description                          ^
 +| 1          | PK00492 EK8 pin 4       | External vertical deflection         |
 +| 2          |                         | GND for pin 7                        |
 +| 3          | PK00591 EF1 pins 2, 4   | Combined blank/external video signal |
 +| 4          | PK00492 EK3 pins 5, 7   | Video signal (post ACB)              |
 +| 5          |                         | GND for pin 4                        |
 +| 6          |                         | GND for pin 1                        |
 +| 7          | PK00492 EK8 pin 2       | External horizontal deflection       |
 +| 8          |                         | GND for pin 3                        |
 +| 9          | N/C                     | N/C                                  |
 +
 +=== Scan output connector ===
 +
 +JST XH connector on a three-colored (black, green, orange) wire harness. Cobbled together by q3k, will be used for image acquisition.
 +
 +^ Pin number ^ Wire color ^ Description ^
 +| 1          | Black      | Ground      |
 +| 2          | Green      | H or V sync |
 +| 3          | Orange     | H or V sync |
 +
 +H/V sync needs to be figured out (by following the wires or with an oscilloscope).
 +
 +H/V sync values are ramps +/- 5V (opamps are supplied +/- 8V).
 +
 +The wires all go to U54 (opamp input) on PK00492 (the scanning board). This opamp is used to read back data from the EK9 connector. This connector allows for chaining scan/detector though the BCX x-ray unit. There might be signal integrity issues with tapping the sync data like this, we'll see.
 +
 +=== Connector types ===
 +
 +Connector types observed in the machine:
 +
 +  - 7556 series: {{ :equipment:jeol-t330a:7.50-5.00mm-vertical-header-7556-series-header.pdf |}}
 +  - DF1 series: {{ :equipment:jeol-t330a:df1-12s-2.5r26_05_cl0541-0068-0-05_catalog_d49650_en.pdf |}}
 +
 +
 +===== To do =====
  
 ==== Long-term ==== ==== Long-term ====
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   - Replace diffusion pump with turbomolecular pump   - Replace diffusion pump with turbomolecular pump
   - Get a better roughing pump (scroll) so it doesn't spew oil everywhere   - Get a better roughing pump (scroll) so it doesn't spew oil everywhere
-  - Figure out what the 'PC' wire harness does 
   - Digital control and acquisition   - Digital control and acquisition
   - E-beam lithography   - E-beam lithography
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   - 2x M4x7.5mm screws for clamping down transformer wires in control module   - 2x M4x7.5mm screws for clamping down transformer wires in control module
-  - [[https://www.microtonano.com/Super-smooth-conductive-double-sided-adhesive-carbon-tapes-for-SEM-EDS-and-GSR.php|Double-sided carbon adhesive tape]] ~24€ 
   - (Torx?) socket cap head M4x12 screws for vacuum fittings   - (Torx?) socket cap head M4x12 screws for vacuum fittings
  
 ===== Log ===== ===== Log =====
 +
 +=== 2025/01/31 (q3k, rob, 0ff) ===
 +
 +New sample holder (EM-Tec JV50 + EM-Tec J4) has been attached.
 +
 +=== 2025/01/10 (q3k, rob, 0ff) ===
 +
 +New scintillator (PLANOTEC P47) has been mounted.
 +
 +=== 2024/11/09 (hugo, rahix, leah, ln) ===
 +
 +Replaced the succbone relay boards with a MODBUS-based system.  Added MODBUS-based temperature measurements for the diffusion pump.
 +
 +=== 2024/10/15 (q3k, rob) ===
 +
 +Buzzed out 'PC' connector and added scan output connector.
 +
 +=== 2024/10/14 (q3k, 0ff, hugo) ===
 +
 +Cleaned apertures in column a bit after building custom tool to extract the pole parts from the column.
 +
 +Got some even better images.
 +
 +=== 2024/10/12 (q3k, hugo, 2x guest) ===
 +
 +Fixed alignment of the cathode. Spent some time dialing in optics.
 +
 +Got some better images.
 +
 +=== 2024/10/10 (q3k, hugo, 0ff, rob) ===
 +
 +Attached samples to stage (QF105 die, stainless steel M3 screw).
 +
 +Took first images, but they're very grainy.
 +
 +Weird electron gun behaviour. Filament doesn't seem to saturate. Increasing current would increase emissions, but past some point the emissions would just stop. No second bump even with the filament knob all up to 11. Gun bias anything other than lowest setting would pretty much stop all emissions.
 +
 +q3k says:
 +
 +  - Maybe I reassembled the wehnelt wrong?
 +  - Maybe I damaged the cathode when cleaning the wehnelt?
 +  - Maybe I reconnected the HV cable to the electron gun wrong? I pulled it out when I thought I had to empty the transformer tank.
 +
 +To set the electron gun bias according per the manual's process, filament current readout is needed. The one built into the scope broke because the comparator in the checker board got fried again. We should figure out what's happening there. We might also be able to just remove the comparator.
  
 === 2024/10/05 (q3k, rahix, rob) === === 2024/10/05 (q3k, rahix, rob) ===