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| Both sides previous revisionPrevious revision | |||
| equipment:suss-mjb3 [2026/03/30 19:17] – q3k | equipment:suss-mjb3 [2026/03/30 19:22] (current) – q3k | ||
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| **Illumination source:** 200W mercury short-arc lamp | **Illumination source:** 200W mercury short-arc lamp | ||
| - | **Alignment accuracy:** 0.1um | + | **Alignment |