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equipment:zeiss-dsm-962 [2025/02/07 11:31] – created q3k | equipment:zeiss-dsm-962 [2025/03/21 23:52] (current) – q3k | ||
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====== Zeiss DSM 962 ====== | ====== Zeiss DSM 962 ====== | ||
+ | |||
+ | {{: | ||
Our second scanning electron microscope. Nicknamed ' | Our second scanning electron microscope. Nicknamed ' | ||
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**Manufacturing year:** 1995 (?) | **Manufacturing year:** 1995 (?) | ||
- | **Attachments: | + | **Detectors: |
+ | |||
+ | **Attachments/options:** Beam blanker, motorized stage, NORAN EDX | ||
+ | |||
+ | |||
+ | ==== Powering on the scope ==== | ||
+ | |||
+ | - Turn on the water chiller and make sure the valves are configured to run a water loop through Kevin (and not Kenji) | ||
+ | - Plug in the main power connector to a power socket | ||
+ | - Turn the key on the console to ' | ||
+ | - If you were at atmosphere before evacuating, the evacuation will time out. Quickly press reset on the vacuum control panel before the system vents fully again. Evacuation will start up again. | ||
+ | - Once the column reaches HV-capable pressure (marked on the bar graph with a piece of tape), an LED will illuminate on the control panel and you can turn on the rest of the system. Rotate the key to the ' | ||
+ | - Wait for the DOS software to boot. | ||
+ | - Enable high voltage and filament. | ||
+ | - The system should now be operational. | ||
+ | |||
+ | ==== Venting the column === | ||
+ | |||
+ | To vent the column (eg. to change samples or inspect/ | ||
+ | |||
+ | - Press the VENT button on the vacuum control panel | ||
+ | - Wait a surprisingly long time (until hissing is done) | ||
+ | - Open chamber / gun, do your work, close it. | ||
+ | - Press the EVAC button on the vacuum control panel. | ||
+ | |||
+ | ==== Using the EDX system ==== | ||
+ | |||
+ | The detector is currently not mounted, but you can try using the system for image acquisition. | ||
+ | |||
+ | - Power on the Dell PC, wait for a boot to desktop | ||
+ | - Start the 'NSS ohne drift' script from the desktop | ||
+ | - Start the ' | ||
+ | - Select an existing or create a new project | ||
+ | - Ignore the warning about the detector being at high temperature (it's not, it's just disconnected) | ||
+ | - Select ' | ||
+ | - Press play to do a live acquisition, | ||
+ | |||
+ | If everything goes well, the DSM will go into ' | ||
+ | |||
+ | ==== Powering off the scope ==== | ||
+ | |||
+ | - Turn the key to the ' | ||
+ | - After the turbo spins down fully (listen to it by ear), disconnect the main power plug. | ||
+ | - Turn off the water chiller once temperature is below 24 degrees Celsius. | ||
+ | |||
+ | ==== Vacuum-System ==== | ||
+ | |||
+ | The vacuum system looks like follows: | ||
+ | |||
+ | {{: | ||
+ | |||
+ | The original roughing pump (RP) is an Edwards E2M8 rotary pump, we have a replacement. Our DSM is equipped with a Pfeiffer TPH 240 IS turbomolecular pump. | ||
+ | |||
+ | ==== Electronics ==== | ||
+ | |||
+ | The DSM 962's main display is powered by the BIVAS, a separate box interconnected to many of the systems of the DSM itself: | ||
+ | |||
+ | {{: | ||
+ | |||
+ | |||
+ | === PC Side === | ||
+ | |||
+ | The PC side of the BIVAS contains a Piads **SBC288**, a **D3142** MFM hard drive, connected to a FINLUX **MD640.350** electroluminescent display. | ||
+ | |||
+ | == CPU == | ||
+ | |||
+ | The SBC is (presumably, | ||
+ | |||
+ | |||
+ | == Harddrive == | ||
+ | |||
+ | The harddrive is a NEC 3142 44MB MFM hard drive. In contrast to [[https:// | ||
+ | |||
+ | == SD Card == | ||
+ | |||
+ | A BlueSCSI v2 replaces the old Bernoulli Box SCSI device. It is available on the D: drive. When the SD card is ejected, the BlueSCSI v2 does not enumerate on SCSI anymore, so avoid accessing the D: drive then - otherwise you might have to reboot the machine to get it working again. | ||
+ | |||
+ | == Displays == | ||
+ | |||
+ | The DSM supports up to three displays, the main display (built-in EL display) plus two external displays. Supposedly, the second external display is used by the EDX system (Todo: verify assumption), | ||
+ | |||
+ | The main display' | ||
+ | |||
+ | {{: | ||
+ | |||
+ | == Software == | ||
+ | |||
+ | {{: | ||
+ | |||
+ | The SBC runs a version of DOS 5.0 and a Zeiss/ | ||
+ | |||
+ | * V2.0 (C)92 Carl Zeiss | ||
+ | * V2.13 (C)93 Carl Zeiss | ||
+ | * V2.30 (C)1996 LEO GmbH | ||
+ | |||
+ | Part of the boot up is calling a program called **init_sbc** that supposedly restores (some of the) SBC's bios settings. | ||
+ | |||
+ | === BIOS settings === | ||
+ | |||
+ | We replaced the BIOS battery. In case it dies again, you will have to set the BIOS to defaults, then press F1 and change the **Diskette drive-0** to 1.4 Mb **Fix-disk drive-0** type to **29**. Press F2 and let the device boot, some software will then reconfigure the rest of the BIOS accordingly. |