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| equipment:zeiss-dsm-962 [2025/02/23 08:12] – 0ff | equipment:zeiss-dsm-962 [2026/02/14 17:37] (current) – [Setting up the vibration isolation] rahix | ||
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| **Manufacturing year:** 1995 (?) | **Manufacturing year:** 1995 (?) | ||
| + | |||
| + | **Detectors: | ||
| **Attachments/ | **Attachments/ | ||
| + | |||
| + | ⇒ [[equipment: | ||
| + | |||
| + | ==== Powering on the scope ==== | ||
| + | |||
| + | - Turn on the water chiller and make sure the valves are configured to run a water loop through Kevin (and not Kenji) | ||
| + | - Plug in the main power connector to a power socket | ||
| + | - Turn the key on the console to ' | ||
| + | - If you were at atmosphere before evacuating, the evacuation will time out. Quickly press reset on the vacuum control panel before the system vents fully again. Evacuation will start up again. | ||
| + | - Once the column reaches HV-capable pressure (marked on the bar graph with a piece of tape), an LED will illuminate on the control panel and you can turn on the rest of the system. Rotate the key to the ' | ||
| + | - Wait for the DOS software to boot. | ||
| + | - Enable high voltage and filament. | ||
| + | - The system should now be operational. | ||
| + | |||
| + | ==== Venting the column ==== | ||
| + | |||
| + | To vent the column (eg. to change samples or inspect/ | ||
| + | |||
| + | - Press the VENT button on the vacuum control panel | ||
| + | - Wait a surprisingly long time (until hissing is done) | ||
| + | - Open chamber / gun, do your work, close it. | ||
| + | - Press the EVAC button on the vacuum control panel. | ||
| + | |||
| + | ==== Setting up the vibration isolation ==== | ||
| + | |||
| + | Before imaging, you will need to set up the vibration isolation of the SEM column. | ||
| + | |||
| + | - At the back of the SEM you will find 3 translucent blue tubes, each ending in an isolation valve and a tire valve adapter. | ||
| + | {{: | ||
| + | - Connect the bike pump to the tube labelled '' | ||
| + | - Pump up the bellows to 2.9 barg. After reaching that pressure, the bellows start suddenly moving quickly. | ||
| + | - Immediately stop pumping and go very slowly. | ||
| + | - Close the blue isolation valve on the tube and disconnect the bike pump. Carefully release some air using the isolation valve until the bellows height is about half-way. | ||
| + | - You want the bellows to be roughly around the center of their extension range. | ||
| + | - After pumping up the front bellows, attach the bike pump to one of the back bellows. | ||
| + | - Repeat the pumping procedure detailed above. | ||
| + | - Finally pump up the other back bellow ('' | ||
| + | |||
| + | You can find more info in the log entries ([[equipment: | ||
| + | |||
| + | ==== Using the EDX system ==== | ||
| + | |||
| + | The detector is currently not mounted, but you can try using the system for image acquisition. | ||
| + | |||
| + | - Power on the Dell PC, wait for a boot to desktop | ||
| + | - Start the 'NSS ohne drift' script from the desktop | ||
| + | - Start the ' | ||
| + | - Select an existing or create a new project | ||
| + | - Ignore the warning about the detector being at high temperature (it's not, it's just disconnected) | ||
| + | - Select ' | ||
| + | - Press play to do a live acquisition, | ||
| + | |||
| + | If everything goes well, the DSM will go into ' | ||
| + | |||
| + | ==== Powering off the scope ==== | ||
| + | |||
| + | - Turn the key to the ' | ||
| + | - After the turbo spins down fully (listen to it by ear), disconnect the main power plug. | ||
| + | - Turn off the water chiller once temperature is below 24 degrees Celsius. | ||
| + | |||
| + | ==== Vacuum-System ==== | ||
| + | |||
| + | The vacuum system looks like follows: | ||
| + | |||
| + | {{: | ||
| + | |||
| + | The original roughing pump (RP) is an Edwards E2M8 rotary pump, we have a replacement. Our DSM is equipped with a Pfeiffer TPH 240 IS turbomolecular pump. | ||
| ==== Electronics ==== | ==== Electronics ==== | ||
| Line 32: | Line 101: | ||
| The harddrive is a NEC 3142 44MB MFM hard drive. In contrast to [[https:// | The harddrive is a NEC 3142 44MB MFM hard drive. In contrast to [[https:// | ||
| + | |||
| + | == SD Card == | ||
| + | |||
| + | A BlueSCSI v2 replaces the old Bernoulli Box SCSI device. It is available on the D: drive. When the SD card is ejected, the BlueSCSI v2 does not enumerate on SCSI anymore, so avoid accessing the D: drive then - otherwise you might have to reboot the machine to get it working again. | ||
| == Displays == | == Displays == | ||
| Line 53: | Line 126: | ||
| Part of the boot up is calling a program called **init_sbc** that supposedly restores (some of the) SBC's bios settings. | Part of the boot up is calling a program called **init_sbc** that supposedly restores (some of the) SBC's bios settings. | ||
| + | == BIOS settings == | ||
| + | |||
| + | We replaced the BIOS battery. In case it dies again, you will have to set the BIOS to defaults, then press F1 and change the **Diskette drive-0** to 1.4 Mb **Fix-disk drive-0** type to **29**. Press F2 and let the device boot, some software will then reconfigure the rest of the BIOS accordingly. | ||
| - | === Bringup | + | === Motorized Stage Controller |
| - | The SBC's CMOS Battery is completely dead and so it looses all settings on power down. Unfortunately we were unable to find an account of the original settings, yet we were able to bring up the DSM through a mention of the hard disk settings in one of the AUTOEXEC.BAT files on the installation disks. | + | Eurocard device, seems to be running [[https:// |
| - | The current bringup procedure is as follows (improve if you can!) | + | == Cards == |
| - | - First turn on the DSM and let the CMOS checksum check fail | + | - 2x scheck elektronik spe SBC 1.2 (Z80 + PIO + DART) |
| - | - WAIT for the first timeout | + | - 348740-9018.010: |
| - | - Press F1 and change the **Diskette drive-0** to 1.4 Mb **Fix-disk drive-0** type to **29** (no other drive settings know as of yet) | + | - 348740-9017: EPROM labeled 348740-8410.010, |
| - | - Store the settings | + | - Both are connected together with what looks like UART. |
| + | | ||
| + | - 1x PSU? card - 348340-9011 | ||
| + | - 1x UART card (built around Z80 DART) - 348338-9014 | ||
| + | - 1x unknown card - 348340-9016 | ||