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equipment:edwards-306:log [2026/07/29 15:58] – modbus rahixequipment:edwards-306:log [2026/09/27 19:37] (current) – [Journal for the Edwards AUTO 306 Coating Systems] rahix
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 > //This page is a lab notebook. It documents the work done in the lab and our thoughts, theories, and findings related to it. Everything you read here is work in progress and not final results. We believe it is best to have our lab notes out in the open, because it gives more detailed insight into what worked for us and what didn't. Of course you can also use this page to follow our progress!// > //This page is a lab notebook. It documents the work done in the lab and our thoughts, theories, and findings related to it. Everything you read here is work in progress and not final results. We believe it is best to have our lab notes out in the open, because it gives more detailed insight into what worked for us and what didn't. Of course you can also use this page to follow our progress!//
 +
 +==== Day 2026-09-26 (q3k, rahix) ====
 +While attempting to sputter today, noticed a new weird failure mode: The system pumps down, but then, when entering process mode, some valve latches and the chamber pressure suddenly reads up to 1e-1mbar. The system then pumps back down to high vacuum after leaving process mode.
 +
 +It is unclear what is wrong.
 +==== Day 2026-09-03 (q3k) ====
 +New (and modern!) GUI to replace the magic python script for controlling the Argon MFC (mass flow controller) of the sputter coater.
 +
 +{{:equipment:edwards-306:20260903-mfc-gui.png?400|}}
 +
 +Tech: 98.css, lit.js, GRPC (with grpc-web), Rust backend
 +
 +See it in action here: [[https://social.hackerspace.pl/@q3k/117209855318115431]]
 +
 +==== Day 2026-08-27 (rahix, zdmx) ====
 +The fixture plate arrived in the lab! Here are test fits in both of the coating systems:
 +
 +{{:equipment:edwards-306:20260827_fixture_plate_in_evap.jpg?400|}}
 +{{:equipment:edwards-306:20260827_fixture_plate_in_sputter.jpg?400|}}
 +
 +Trying to sputter another glass slide and some biological samples (a fly's wing).
 +
 +First attempt, 30s, nothing got coated at all! What a surprise?!
 +
 +Trying again for a longer period of 3min. Chamber pressure after pump down: 3.6e-5mbar. After opening the argon MFC (setpoint=1V): 2.7e-2mbar.
 +
 +Now it worked!
 +
 +{{:equipment:edwards-306:2026-08-27-fixture-plate-coated.jpeg?400|}}
 +
 +----
 +
 +Here is a short summary explanation of the steps to use the sputter coater:
 +
 +  - Pump down to ''FINE PUMPING'' (pardner)
 +  - Open the argon cylinder, if you didn't already
 +  - Put the chamber in ''PROCESS'', then ''HOLD''
 +  - Use the magic q3k python script, set MFC to 1 volts
 +  - Reset the ''DC-Kathode'' on the control rack
 +  - Turn on the Magnetron Drive
 +  - You should now see a plasma!
 +==== Day 2026-08-22 (rahix, guest) ====
 +Milled a fixture plate for our coating systems. This fixture plate is supposed to allow mounting arbitrary samples for coating in either of the two coating systems. Inside our coaters, there are rails, presumably designed for slotting in wafers. We repurpose them to hold the new fixture plate:
 +
 +{{:equipment:edwards-306:20260816_rails_sputter_coater.jpg?400|}}
 +
 +[Rails inside the sputter coating system, with a green test-print of the fixture plate]
 +
 +{{:equipment:edwards-306:20260816_rails_evap.jpg?400|}}
 +
 +[Rails inside the evap coating system, with the same green test-print]
 +
 +In the evap coater the rails sit much further up, at the top of the chamber.
 +
 +Here is the finished fixture plate with an example fixturing setup:
 +
 +{{:equipment:edwards-306:20260822-fixture-plate-clean.jpg?400|}}
 +
 +The fixture plate has a 12.5×12.5mm grid of M3 threads. On the right, there are 4 bores for holding the JEOL sample stubs (10mm cylinders) that we use for our [[..:zeiss-dsm-962:start|Zeiss DSM 962]] SEM at the moment.
 +==== Day 2026-08-14 (rahix, q3k, hugo) ====
 +Used the sputter coater again today to coat another hair with chromium (results are up on YT: [[https://youtube.com/shorts/rcedO29MCUs]]).
 +
 +During pump down, we ran into the penning gauge ''VOLTS ERR'' again, like on 2026-07-25. Maybe something fell into it again?
 +
 +We didn't check and decided to go ahead with coating regardless, flying blind on the pressure inside the chamber.
 +
 +Coating went well, the hair turned out great at 30s coating time.
 +
 +Will need to check the penning gauge //again// next time. At final pump down, the vacuum system repeatedly failed with ''HIGH VAC FAIL'', presumably due to the penning gauge.
 +
 +==== Day 2026-08-07 (rahix, guest) ====
 +Measured the sample mounting rails inside both coaters to design a custom fixturing system to hold samples above the coating heads.
 +
 +==== Day 2026-08-01 ====
 +A lot of successful sputter coating during the third //Find-Out Forum//.
  
 ==== Day 2026-07-25 (q3k) ==== ==== Day 2026-07-25 (q3k) ====
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 After reassembly, it works again! Measuring 2.8e-4 mbar. After reassembly, it works again! Measuring 2.8e-4 mbar.
  
----+-----
  
 Worked on building automated control of the MFC (Mass Flow Controller). It is now connected to a MODBUS Analog Output module. This can then be controlled from the lab network via a MODBUS-TCP bridge. Worked on building automated control of the MFC (Mass Flow Controller). It is now connected to a MODBUS Analog Output module. This can then be controlled from the lab network via a MODBUS-TCP bridge.
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 TODO q3k: Link script TODO q3k: Link script
  
-This is still work in progress and will likely get replaced by a proper control system (soon<sup>TM</sup>). +This is still work in progress and will likely get replaced by a proper control system (soon<sup>TM</sup>). Ideally the vacuum system of the coater should be integrated here just as well, but that's not trivial.
- +
- +
 ==== Day 2026-07-17 (q3k, guests) ==== ==== Day 2026-07-17 (q3k, guests) ====