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| equipment:edwards-306:log [2026/08/23 15:35] – [Day 2026-08-14 (rahix, q3k, hugo)] rahix | equipment:edwards-306:log [2026/09/27 19:37] (current) – [Journal for the Edwards AUTO 306 Coating Systems] rahix | ||
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| > //This page is a lab notebook. It documents the work done in the lab and our thoughts, theories, and findings related to it. Everything you read here is work in progress and not final results. We believe it is best to have our lab notes out in the open, because it gives more detailed insight into what worked for us and what didn' | > //This page is a lab notebook. It documents the work done in the lab and our thoughts, theories, and findings related to it. Everything you read here is work in progress and not final results. We believe it is best to have our lab notes out in the open, because it gives more detailed insight into what worked for us and what didn' | ||
| + | ==== Day 2026-09-26 (q3k, rahix) ==== | ||
| + | While attempting to sputter today, noticed a new weird failure mode: The system pumps down, but then, when entering process mode, some valve latches and the chamber pressure suddenly reads up to 1e-1mbar. The system then pumps back down to high vacuum after leaving process mode. | ||
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| + | It is unclear what is wrong. | ||
| + | ==== Day 2026-09-03 (q3k) ==== | ||
| + | New (and modern!) GUI to replace the magic python script for controlling the Argon MFC (mass flow controller) of the sputter coater. | ||
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| + | {{: | ||
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| + | Tech: 98.css, lit.js, GRPC (with grpc-web), Rust backend | ||
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| + | See it in action here: [[https:// | ||
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| + | ==== Day 2026-08-27 (rahix, zdmx) ==== | ||
| + | The fixture plate arrived in the lab! Here are test fits in both of the coating systems: | ||
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| + | {{: | ||
| + | {{: | ||
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| + | Trying to sputter another glass slide and some biological samples (a fly's wing). | ||
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| + | First attempt, 30s, nothing got coated at all! What a surprise?! | ||
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| + | Trying again for a longer period of 3min. Chamber pressure after pump down: 3.6e-5mbar. After opening the argon MFC (setpoint=1V): | ||
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| + | Now it worked! | ||
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| + | {{: | ||
| + | |||
| + | ---- | ||
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| + | Here is a short summary explanation of the steps to use the sputter coater: | ||
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| + | - Pump down to '' | ||
| + | - Open the argon cylinder, if you didn't already | ||
| + | - Put the chamber in '' | ||
| + | - Use the magic q3k python script, set MFC to 1 volts | ||
| + | - Reset the '' | ||
| + | - Turn on the Magnetron Drive | ||
| + | - You should now see a plasma! | ||
| + | ==== Day 2026-08-22 (rahix, guest) ==== | ||
| + | Milled a fixture plate for our coating systems. This fixture plate is supposed to allow mounting arbitrary samples for coating in either of the two coating systems. Inside our coaters, there are rails, presumably designed for slotting in wafers. We repurpose them to hold the new fixture plate: | ||
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| + | {{: | ||
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| + | [Rails inside the sputter coating system, with a green test-print of the fixture plate] | ||
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| + | {{: | ||
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| + | [Rails inside the evap coating system, with the same green test-print] | ||
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| + | In the evap coater the rails sit much further up, at the top of the chamber. | ||
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| + | Here is the finished fixture plate with an example fixturing setup: | ||
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| + | {{: | ||
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| + | The fixture plate has a 12.5×12.5mm grid of M3 threads. On the right, there are 4 bores for holding the JEOL sample stubs (10mm cylinders) that we use for our [[..: | ||
| ==== Day 2026-08-14 (rahix, q3k, hugo) ==== | ==== Day 2026-08-14 (rahix, q3k, hugo) ==== | ||
| Used the sputter coater again today to coat another hair with chromium (results are up on YT: [[https:// | Used the sputter coater again today to coat another hair with chromium (results are up on YT: [[https:// | ||