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equipment:edwards-306:start [2026/04/30 18:32] – [Principles of operation] q3kequipment:edwards-306:start [2026/04/30 18:46] (current) – q3k
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 ====== Edwards AUTO 306 Coating System ====== ====== Edwards AUTO 306 Coating System ======
-{{:equipment:edwards-306:20260401_coating-systems-overview.jpg?700|}}+{{:equipment:edwards-306:20260401_coating-systems-overview-with-labels.jpg?700|}}
  
 Multi-process PVD system consisting of two Edwards AUTO 306 coaters and a control cabinet. Multi-process PVD system consisting of two Edwards AUTO 306 coaters and a control cabinet.
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   * **Reset**: in case of failure (timeout, power failure, etc.), acknowledge the fault   * **Reset**: in case of failure (timeout, power failure, etc.), acknowledge the fault
   * **Cycle**: Perform the process above reaching an ultra high vacuum   * **Cycle**: Perform the process above reaching an ultra high vacuum
-  * **Process**: Same as 'cycle', but when an ultimate pressure is reached the chamber seals (the high vacuum valve is closed) and the process can perform a plasma cleaning step+  * **Process**: Same as 'cycle', but when an ultimate pressure is reached the chamber seals (the high vacuum valve is closed) and the user can perform a plasma cleaning step
   * **Seal**: Isolate the chamber from the rest of the system. Usually a prerequisite to then stop or vent the system.   * **Seal**: Isolate the chamber from the rest of the system. Usually a prerequisite to then stop or vent the system.
   * **Stop**: Perform a shutdown process: spin down the turbo and turn off the roughing pump.   * **Stop**: Perform a shutdown process: spin down the turbo and turn off the roughing pump.
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   - Insert sample, and check that shutter actuates when 'SS1' is pressed. If not, manually actuate it a few times and then it should get unstuck.   - Insert sample, and check that shutter actuates when 'SS1' is pressed. If not, manually actuate it a few times and then it should get unstuck.
   - Press 'cycle' after inserting sample.   - Press 'cycle' after inserting sample.
 +
 +==== Plasma Cleaning ====
 +
 +  - Load sample
 +  - Press 'process'.
 +  - Wait until 'fine pumping' is reached (TODO: set thresholds correctly)
 +  - Press 'seal'.
 +  - Select the 'chamber' readout on the vacuum controller with the up/down arrows.
 +  - Open the vent butterfly valve (below chamber), and then slowly open needle valve until pressure starts rising.
 +  - Close valves when pressure reaches around 1e-1 mbar. If overshot, restart process.
 +  - Set LT/0/HT selector to HT, slowly bring up power knob until plasma starts in the chamber and current flows.
 +  - Tweak needle valve and power until a stable plasma is achieved that fills up as much of the chamber as possible.
 +  - Manual recommends running plasma cleaning for 20 minutes for every loaded sample before coating it. No experiments have been performed to confirm whether this actually helps with coating.
  
 ==== Simple Coating ==== ==== Simple Coating ====