meta data for this page
  •  

Differences

This shows you the differences between two versions of the page.

Link to this comparison view

Both sides previous revisionPrevious revision
equipment:edwards-306:start [2026/04/30 18:40] q3kequipment:edwards-306:start [2026/04/30 18:46] (current) q3k
Line 50: Line 50:
   * **Reset**: in case of failure (timeout, power failure, etc.), acknowledge the fault   * **Reset**: in case of failure (timeout, power failure, etc.), acknowledge the fault
   * **Cycle**: Perform the process above reaching an ultra high vacuum   * **Cycle**: Perform the process above reaching an ultra high vacuum
-  * **Process**: Same as 'cycle', but when an ultimate pressure is reached the chamber seals (the high vacuum valve is closed) and the process can perform a plasma cleaning step+  * **Process**: Same as 'cycle', but when an ultimate pressure is reached the chamber seals (the high vacuum valve is closed) and the user can perform a plasma cleaning step
   * **Seal**: Isolate the chamber from the rest of the system. Usually a prerequisite to then stop or vent the system.   * **Seal**: Isolate the chamber from the rest of the system. Usually a prerequisite to then stop or vent the system.
   * **Stop**: Perform a shutdown process: spin down the turbo and turn off the roughing pump.   * **Stop**: Perform a shutdown process: spin down the turbo and turn off the roughing pump.