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equipment:edwards-306:start [2026/04/30 18:46] – q3kequipment:edwards-306:start [2026/07/18 22:09] (current) – q3k
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 **Sputter:** **Sputter:**
  
-Needs Argon and refurbishing / bringup.+First sputter experiments were successful, process being tuned and MFC contro system is being built
  
 **Coater:** **Coater:**
  
-Thermal evaporation works, e-beam needs bringup. Film thickness monitor needs a new crystal.+Working.
  
 ===== Resources ===== ===== Resources =====
  
   * [[equipment:edwards-306:log|Lab Notebook for the Coating System]]   * [[equipment:edwards-306:log|Lab Notebook for the Coating System]]
-  * [[https://git.fa-fo.de/fafo/edwards-auto-306/raw/branch/main/manuals/AUTO%20306%20Vacuum%20Coater%20-%20Volume%201%20-%20Installation%20and%20Maintenance%20Instructions.pdf|Edwards AUTO 306 - Volume 1 - Installation and Maintenance Instructions]] +  * Documentation 
-  * [[https://git.fa-fo.de/fafo/edwards-auto-306/raw/branch/main/manuals/AUTO%20306%20Vacuum%20Coater%20-%20Volume%202%20-%20Operating%20Instructions.pdf|Edwards AUTO 306 - Volume 2 - Operating Instructions]] +    * [[https://git.fa-fo.de/fafo/edwards-auto-306/raw/branch/main/manuals/AUTO%20306%20Vacuum%20Coater%20-%20Volume%201%20-%20Installation%20and%20Maintenance%20Instructions.pdf|Edwards AUTO 306 - Volume 1 - Installation and Maintenance Instructions]] 
-  * [[https://git.fa-fo.de/fafo/edwards-auto-306/raw/branch/main/manuals/EXC%20Turbomolecular%20Pump%20Controllers.pdf|Edwards - Turbomolecular Pump Controller Manual]] +    * [[https://git.fa-fo.de/fafo/edwards-auto-306/raw/branch/main/manuals/AUTO%20306%20Vacuum%20Coater%20-%20Volume%202%20-%20Operating%20Instructions.pdf|Edwards AUTO 306 - Volume 2 - Operating Instructions]] 
-  * Techtree: [[https://git.fa-fo.de/fafo/techtree/issues/56|PVD: Thermal Evaporation]] & [[https://git.fa-fo.de/fafo/techtree/issues/37|PVD: Sputtering]]+    * [[https://git.fa-fo.de/fafo/edwards-auto-306/raw/branch/main/manuals/EXC%20Turbomolecular%20Pump%20Controllers.pdf|Edwards - Turbomolecular Pump Controller Manual]] 
 +  * Techtree: 
 +    * [[https://git.fa-fo.de/fafo/techtree/issues/56|PVD: Thermal Evaporation]] 
 +    * [[https://git.fa-fo.de/fafo/techtree/issues/37|PVD: Sputtering]] 
 +    * [[https://git.fa-fo.de/fafo/techtree/issues/122|E-Beam PVD]]
  
-{{:equipment:edwards-306:edwards-306-evaporator-panel.png?direct&400|}} 
  
 ===== Standard Operating Procedure ===== ===== Standard Operating Procedure =====
 +{{:equipment:edwards-306:edwards-306-evaporator-panel.png?direct&400|}}
  
 Currently written for the thermal evap unit, should be unified with the sputter unit as it is brought up. Currently written for the thermal evap unit, should be unified with the sputter unit as it is brought up.
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   - Turn off power at rack unit.   - Turn off power at rack unit.
  
 +===== Sputter coater MFCs =====
 +
 +Channel 1: 100SCCM Ar. Channel 2: 100SCCM N2.
 +
 +Pinout:
 +
 +  * Pin 2: Control 0-10V (0-100% of rated flow).
 +  * Pin 4: Output 0-10V (feedback from control).
 +  * Pin 5: shield
 +  * Pin 6: +15V
 +  * Pin 7: test output (unknown)
 +  * Pin 8: common/GND
 +  * Pin 9: -15V
  
 +Currently controlled by lab PSUs. Modbus integration is WIP.