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equipment:edwards-306:start [2026/05/17 15:30] – rahixequipment:edwards-306:start [2026/07/18 22:09] (current) – q3k
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 **Sputter:** **Sputter:**
  
-Needs Argon and refurbishing / bringup.+First sputter experiments were successful, process being tuned and MFC contro system is being built
  
 **Coater:** **Coater:**
  
-Thermal evaporation works, e-beam needs bringup. Film thickness monitor needs a new crystal.+Working.
  
 ===== Resources ===== ===== Resources =====
  
   * [[equipment:edwards-306:log|Lab Notebook for the Coating System]]   * [[equipment:edwards-306:log|Lab Notebook for the Coating System]]
-  * [[https://git.fa-fo.de/fafo/edwards-auto-306/raw/branch/main/manuals/AUTO%20306%20Vacuum%20Coater%20-%20Volume%201%20-%20Installation%20and%20Maintenance%20Instructions.pdf|Edwards AUTO 306 - Volume 1 - Installation and Maintenance Instructions]] +  * Documentation 
-  * [[https://git.fa-fo.de/fafo/edwards-auto-306/raw/branch/main/manuals/AUTO%20306%20Vacuum%20Coater%20-%20Volume%202%20-%20Operating%20Instructions.pdf|Edwards AUTO 306 - Volume 2 - Operating Instructions]] +    * [[https://git.fa-fo.de/fafo/edwards-auto-306/raw/branch/main/manuals/AUTO%20306%20Vacuum%20Coater%20-%20Volume%201%20-%20Installation%20and%20Maintenance%20Instructions.pdf|Edwards AUTO 306 - Volume 1 - Installation and Maintenance Instructions]] 
-  * [[https://git.fa-fo.de/fafo/edwards-auto-306/raw/branch/main/manuals/EXC%20Turbomolecular%20Pump%20Controllers.pdf|Edwards - Turbomolecular Pump Controller Manual]]+    * [[https://git.fa-fo.de/fafo/edwards-auto-306/raw/branch/main/manuals/AUTO%20306%20Vacuum%20Coater%20-%20Volume%202%20-%20Operating%20Instructions.pdf|Edwards AUTO 306 - Volume 2 - Operating Instructions]] 
 +    * [[https://git.fa-fo.de/fafo/edwards-auto-306/raw/branch/main/manuals/EXC%20Turbomolecular%20Pump%20Controllers.pdf|Edwards - Turbomolecular Pump Controller Manual]]
   * Techtree:   * Techtree:
     * [[https://git.fa-fo.de/fafo/techtree/issues/56|PVD: Thermal Evaporation]]     * [[https://git.fa-fo.de/fafo/techtree/issues/56|PVD: Thermal Evaporation]]
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   - Turn off power at rack unit.   - Turn off power at rack unit.
  
 +===== Sputter coater MFCs =====
  
 +Channel 1: 100SCCM Ar. Channel 2: 100SCCM N2.
 +
 +Pinout:
 +
 +  * Pin 2: Control 0-10V (0-100% of rated flow).
 +  * Pin 4: Output 0-10V (feedback from control).
 +  * Pin 5: shield
 +  * Pin 6: +15V
 +  * Pin 7: test output (unknown)
 +  * Pin 8: common/GND
 +  * Pin 9: -15V
 +
 +Currently controlled by lab PSUs. Modbus integration is WIP.