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| equipment:edwards-e306a:log [2026/04/04 22:18] – q3k | equipment:edwards-e306a:log [2026/05/02 19:08] (current) – [Journal for E306A Coating System] rahix | ||
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| See [[equipment: | See [[equipment: | ||
| - | ==== Day 2026-03-30 ==== | + | ==== Day 2026-04-25 (rahix) |
| - | Brought | + | Electrical inspection (V3) of the machine. Rewired a few plugs. Everything passed! |
| + | ==== Day 2026-04-12 (q3k) ==== | ||
| - | Bypassed front panel lock (no keys), replaced key lock core with flathead-driven lock core. | + | Fit new vent valve holder. Still a bit loose but better. Should probably hold the pipeline instead of the valve... |
| - | ==== Day 2026-04-02 (q3k, Rob, Hugo) ==== | + | Reprinted knob to fit shaft better. Partially retapped shaft to M6 - previous thread didn't seem metric. |
| - | First inspection of device. | + | Fixed leak at pirani gauge after swapping it for some tests earlier. Took normal KF centering ring. |
| - | Cooling circuit leaking at inlet block, inlet coupler (through chassis), outlet tee, outlet coupler (through chassis). | + | Attempted to run diffusion pump. A bunch of stuff offgassed and the pump sizzled but there was no extra vacuum. Need to inspect and probably fill, no other choice now... |
| - | Rebuilt inlet block, replaced push fitting in it. Doesn' | + | ==== Day 2026-04-04 (q3k, Hugo, Rob) ==== |
| - | Bypassed inlet coupler and outlet coupler (connecting water cooling circuit directly to block and output tee). Still leaks at tee, ordered replacement. | + | Ordered activated alumina |
| - | + | ||
| - | Found dangling 230V cable (black) in lower chassis. Discovered it's a feedback cable (230V, NO, relay input) to the electric shutter | + | |
| - | Briefly attempted | + | Valve actuates, but leaks. Ended up replacing it with a modern vent valve with an ISO KF flange. The threaded flanges from Edwards are compatible enough to get us to a decent |
| - | Installed 3d printed toilet paper roll oil mist filter. | + | Water inlet block got PTFE tape replaced with o-rings. Water outlet tee got swapped for one borrowed from the membrane pump. |
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| + | Roughing pump oil is really smelly, even with the oil mist filter. | ||
| + | |||
| + | Replaced oil with ISO VG 68 from 2022. Did a small purge cycle just to get the manky old oil out. Now reaching an ultimate pressure of around 8e-2 mbar. Put old oil into plastic canister, ended up accidentally causing an emulsion with water using detergent - we should clean that up (salt it out with brine?) before handing it off to the Wertstoffhof. | ||
| + | |||
| + | 3D printed a holder for the new vent valve, but needs some small rework to hold the valve better. | ||
| ==== Day 2026-04-03 (q3k, Rob, Hugo) ==== | ==== Day 2026-04-03 (q3k, Rob, Hugo) ==== | ||
| Line 44: | Line 49: | ||
| Substrate/ | Substrate/ | ||
| - | ==== Day 2026-04-04 (q3k, Hugo, Rob) ==== | + | ==== Day 2026-04-02 (q3k, Rob, Hugo) ==== |
| - | Ordered activated alumina from Roth. | + | First inspection of device. |
| - | Valve actuates, but leaks. Ended up replacing it with a modern vent valve with an ISO KF flange. The threaded flanges from Edwards are compatible enough to get us to a decent rough vacuum. New valve needs wiring done well (currently there is no strain relief) and a new mount (currently everything dangles off the vent line, which risks breaking it). | + | Cooling circuit leaking at inlet block, inlet coupler |
| - | Water inlet block got PTFE tape replaced | + | Rebuilt |
| - | Roughing pump oil is really smelly, even with the oil mist filter. | + | Bypassed inlet coupler and outlet coupler (connecting water cooling circuit directly to block and output tee). Still leaks at tee, ordered replacement. |
| + | |||
| + | Found dangling 230V cable (black) in lower chassis. Discovered it's a feedback cable (230V, NO, relay input) to the electric shutter from a missing film thickness monitor. Took apart electric shutter controller to discover this, pulled N wire from its terminal block by accident, reinstalled. Should be fine, but would really benefit from a re-crimp with ferrules. | ||
| + | |||
| + | Briefly attempted to pull a rough vacuum. Pirani gauge started going down. | ||
| + | |||
| + | Installed 3d printed toilet paper roll oil mist filter. | ||
| + | |||
| + | ==== Day 2026-03-30 ==== | ||
| + | Brought the system into out lab. | ||
| + | |||
| + | Bypassed front panel lock (no keys), replaced key lock core with flathead-driven lock core. | ||