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equipment:jeol-t330a [2024/10/15 17:59] – q3k | equipment:jeol-t330a [2025/02/07 11:28] (current) – q3k | ||
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{{: | {{: | ||
- | Our scanning electron microscope. Quick specs: | + | Our first scanning electron microscope. Nicknamed ' |
**Maximum acceleration voltage:** 30kV | **Maximum acceleration voltage:** 30kV | ||
Line 67: | Line 67: | ||
| Flange towards RP | 1 | 21 x 2.2 | Odd size? | | | Flange towards RP | 1 | 21 x 2.2 | Odd size? | | ||
| Flange towards solenoid valve | 1 | 26 x 3.5 | | | | Flange towards solenoid valve | 1 | 26 x 3.5 | | | ||
- | |||
- | === Connector types === | ||
- | |||
- | Connector types observed in the machine: | ||
- | |||
- | - 7556 series: {{ : | ||
- | - DF1 series: {{ : | ||
==== Attachments ==== | ==== Attachments ==== | ||
Line 96: | Line 89: | ||
| 3 | PK00591 EF1 pins 2, 4 | Combined blank/ | | 3 | PK00591 EF1 pins 2, 4 | Combined blank/ | ||
| 4 | PK00492 EK3 pins 5, 7 | Video signal (post ACB) | | | 4 | PK00492 EK3 pins 5, 7 | Video signal (post ACB) | | ||
- | | 5 | | GND for pin 6 | | + | | 5 | | GND for pin 4 | |
| 6 | | GND for pin 1 | | | 6 | | GND for pin 1 | | ||
| 7 | PK00492 EK8 pin 2 | External horizontal deflection | | 7 | PK00492 EK8 pin 2 | External horizontal deflection | ||
Line 102: | Line 95: | ||
| 9 | N/C | N/C | | | 9 | N/C | N/C | | ||
+ | === Scan output connector === | ||
- | ===== To do ===== | + | JST XH connector on a three-colored (black, green, orange) wire harness. Cobbled together by q3k, will be used for image acquisition. |
- | ==== Blockers ==== | + | ^ Pin number ^ Wire color ^ Description ^ |
+ | | 1 | Black | Ground | ||
+ | | 2 | Green | H or V sync | | ||
+ | | 3 | Orange | ||
- | - Machine/acquire sample holders | + | H/V sync needs to be figured out (by following the wires or with an oscilloscope). |
- | - Track down column leak(s) | + | |
- | - Check/ | + | |
+ | H/V sync values are ramps +/- 5V (opamps are supplied +/- 8V). | ||
+ | |||
+ | The wires all go to U54 (opamp input) on PK00492 (the scanning board). This opamp is used to read back data from the EK9 connector. This connector allows for chaining scan/ | ||
+ | |||
+ | === Connector types === | ||
+ | |||
+ | Connector types observed in the machine: | ||
+ | |||
+ | - 7556 series: {{ : | ||
+ | - DF1 series: {{ : | ||
+ | |||
+ | |||
+ | ===== To do ===== | ||
==== Long-term ==== | ==== Long-term ==== | ||
Line 116: | Line 124: | ||
- Replace diffusion pump with turbomolecular pump | - Replace diffusion pump with turbomolecular pump | ||
- Get a better roughing pump (scroll) so it doesn' | - Get a better roughing pump (scroll) so it doesn' | ||
- | - Figure out what the ' | ||
- Digital control and acquisition | - Digital control and acquisition | ||
- E-beam lithography | - E-beam lithography | ||
Line 124: | Line 131: | ||
- 2x M4x7.5mm screws for clamping down transformer wires in control module | - 2x M4x7.5mm screws for clamping down transformer wires in control module | ||
- | - [[https:// | ||
- (Torx?) socket cap head M4x12 screws for vacuum fittings | - (Torx?) socket cap head M4x12 screws for vacuum fittings | ||
===== Log ===== | ===== Log ===== | ||
+ | |||
+ | === 2025/01/31 (q3k, rob, 0ff) === | ||
+ | |||
+ | New sample holder (EM-Tec JV50 + EM-Tec J4) has been attached. | ||
+ | |||
+ | === 2025/01/10 (q3k, rob, 0ff) === | ||
+ | |||
+ | New scintillator (PLANOTEC P47) has been mounted. | ||
+ | |||
+ | === 2024/11/09 (hugo, rahix, leah, ln) === | ||
+ | |||
+ | Replaced the succbone relay boards with a MODBUS-based system. | ||
+ | |||
+ | === 2024/10/15 (q3k, rob) === | ||
+ | |||
+ | Buzzed out ' | ||
+ | |||
+ | === 2024/10/14 (q3k, 0ff, hugo) === | ||
+ | |||
+ | Cleaned apertures in column a bit after building custom tool to extract the pole parts from the column. | ||
+ | |||
+ | Got some even better images. | ||
+ | |||
+ | === 2024/10/12 (q3k, hugo, 2x guest) === | ||
+ | |||
+ | Fixed alignment of the cathode. Spent some time dialing in optics. | ||
+ | |||
+ | Got some better images. | ||
=== 2024/10/10 (q3k, hugo, 0ff, rob) === | === 2024/10/10 (q3k, hugo, 0ff, rob) === |