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equipment:suss-mjb3 [2026/03/30 19:17] q3kequipment:suss-mjb3 [2026/03/30 19:22] (current) q3k
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 **Illumination source:** 200W mercury short-arc lamp **Illumination source:** 200W mercury short-arc lamp
  
-**Alignment accuracy:** 0.1um+**Alignment resolution/accuracy:** 1.5um / 0.1um