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quests [2025/02/07 11:26] – q3kquests [2025/02/07 11:44] (current) – [Roughing pump for Zeiss SEM] q3k
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 ==== Roughing pump for Zeiss SEM ==== ==== Roughing pump for Zeiss SEM ====
  
-We need a roughing pump for our new-to-us SEM. As it will be backing a turbo, it needs to be a dry pump. This means we really have a choice between two technologies: scroll pumps and Roots pumps. The latter is preferable, as scroll pumps have PTFE tips which wear out and are difficult to source replacements for. The tips wearing out also generate some dust. So we should go for a Roots pump.+We need a roughing pump for our new-to-us SEM. As it will be backing a turbo, it needs to be a dry pump. This means we really have a choice between three technologies: scroll pumps, screw pumps and Roots pumps. The former is inadvisable, as scroll pumps have PTFE tips which wear out and are difficult to source replacements for. The tips wearing out also generate some dust. So we should go for a Roots pump.
  
 Some recommendations: “Kashiyama NeoDry would 100% be my first choice, Ebara PDV/Osaka DSP/etc second”. Some recommendations: “Kashiyama NeoDry would 100% be my first choice, Ebara PDV/Osaka DSP/etc second”.
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 Deliverable: have said pump on site. Deliverable: have said pump on site.
  
-==== PFPE vacuum oil (ie. Fomblin) for Leybold pump in plasma etcher ====+==== PFPE vacuum oil (eg. Fomblin) for Leybold pump in plasma etcher ====
  
 The plasma etcher came with a Leybold D16BCS rotary vane pump capable of being filled with chemically-resistant PFPE 'oils'. In case we find a good cheap refill of Fomblin we should get that. Otherwise any PFPE vacuum pump oil that can resist SF6 will do. The plasma etcher came with a Leybold D16BCS rotary vane pump capable of being filled with chemically-resistant PFPE 'oils'. In case we find a good cheap refill of Fomblin we should get that. Otherwise any PFPE vacuum pump oil that can resist SF6 will do.