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| equipment:edwards-306:log [2026/05/30 22:54] – q3k | equipment:edwards-306:log [2026/05/31 14:14] (current) – rahix | ||
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| Turns out RF sputter head isn't being cooled well - that might be the cause. We should dismantle it and check for damage (esp. magnets), and also try to cool it with the water chiller attached directly. | Turns out RF sputter head isn't being cooled well - that might be the cause. We should dismantle it and check for damage (esp. magnets), and also try to cool it with the water chiller attached directly. | ||
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| ==== Day 2026-05-16 (q3k, implr, hugo) ==== | ==== Day 2026-05-16 (q3k, implr, hugo) ==== | ||