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equipment:edwards-306:start [2026/04/30 18:36] – q3kequipment:edwards-306:start [2026/05/17 15:31] (current) – [Resources] rahix
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 ====== Edwards AUTO 306 Coating System ====== ====== Edwards AUTO 306 Coating System ======
-{{:equipment:edwards-306:20260401_coating-systems-overview.jpg?700|}}+{{:equipment:edwards-306:20260401_coating-systems-overview-with-labels.jpg?700|}}
  
 Multi-process PVD system consisting of two Edwards AUTO 306 coaters and a control cabinet. Multi-process PVD system consisting of two Edwards AUTO 306 coaters and a control cabinet.
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   * [[equipment:edwards-306:log|Lab Notebook for the Coating System]]   * [[equipment:edwards-306:log|Lab Notebook for the Coating System]]
-  * [[https://git.fa-fo.de/fafo/edwards-auto-306/raw/branch/main/manuals/AUTO%20306%20Vacuum%20Coater%20-%20Volume%201%20-%20Installation%20and%20Maintenance%20Instructions.pdf|Edwards AUTO 306 - Volume 1 - Installation and Maintenance Instructions]] +  * Documentation 
-  * [[https://git.fa-fo.de/fafo/edwards-auto-306/raw/branch/main/manuals/AUTO%20306%20Vacuum%20Coater%20-%20Volume%202%20-%20Operating%20Instructions.pdf|Edwards AUTO 306 - Volume 2 - Operating Instructions]] +    * [[https://git.fa-fo.de/fafo/edwards-auto-306/raw/branch/main/manuals/AUTO%20306%20Vacuum%20Coater%20-%20Volume%201%20-%20Installation%20and%20Maintenance%20Instructions.pdf|Edwards AUTO 306 - Volume 1 - Installation and Maintenance Instructions]] 
-  * [[https://git.fa-fo.de/fafo/edwards-auto-306/raw/branch/main/manuals/EXC%20Turbomolecular%20Pump%20Controllers.pdf|Edwards - Turbomolecular Pump Controller Manual]] +    * [[https://git.fa-fo.de/fafo/edwards-auto-306/raw/branch/main/manuals/AUTO%20306%20Vacuum%20Coater%20-%20Volume%202%20-%20Operating%20Instructions.pdf|Edwards AUTO 306 - Volume 2 - Operating Instructions]] 
-  * Techtree: [[https://git.fa-fo.de/fafo/techtree/issues/56|PVD: Thermal Evaporation]] & [[https://git.fa-fo.de/fafo/techtree/issues/37|PVD: Sputtering]]+    * [[https://git.fa-fo.de/fafo/edwards-auto-306/raw/branch/main/manuals/EXC%20Turbomolecular%20Pump%20Controllers.pdf|Edwards - Turbomolecular Pump Controller Manual]] 
 +  * Techtree: 
 +    * [[https://git.fa-fo.de/fafo/techtree/issues/56|PVD: Thermal Evaporation]] 
 +    * [[https://git.fa-fo.de/fafo/techtree/issues/37|PVD: Sputtering]] 
 +    * [[https://git.fa-fo.de/fafo/techtree/issues/122|E-Beam PVD]]
  
-{{:equipment:edwards-306:edwards-306-evaporator-panel.png?direct&400|}} 
  
 ===== Standard Operating Procedure ===== ===== Standard Operating Procedure =====
 +{{:equipment:edwards-306:edwards-306-evaporator-panel.png?direct&400|}}
  
 Currently written for the thermal evap unit, should be unified with the sputter unit as it is brought up. Currently written for the thermal evap unit, should be unified with the sputter unit as it is brought up.
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   * **Reset**: in case of failure (timeout, power failure, etc.), acknowledge the fault   * **Reset**: in case of failure (timeout, power failure, etc.), acknowledge the fault
   * **Cycle**: Perform the process above reaching an ultra high vacuum   * **Cycle**: Perform the process above reaching an ultra high vacuum
-  * **Process**: Same as 'cycle', but when an ultimate pressure is reached the chamber seals (the high vacuum valve is closed) and the process can perform a plasma cleaning step+  * **Process**: Same as 'cycle', but when an ultimate pressure is reached the chamber seals (the high vacuum valve is closed) and the user can perform a plasma cleaning step
   * **Seal**: Isolate the chamber from the rest of the system. Usually a prerequisite to then stop or vent the system.   * **Seal**: Isolate the chamber from the rest of the system. Usually a prerequisite to then stop or vent the system.
   * **Stop**: Perform a shutdown process: spin down the turbo and turn off the roughing pump.   * **Stop**: Perform a shutdown process: spin down the turbo and turn off the roughing pump.